Mist Chemical Vapor Deposition: A Novel Solution-Based Film Deposition Technique

Crystal Growth & Design 2026

View at publisher

Authors: Guoqiang Yi, Zhen Lu, Ying Chang, Jiarui Yan, Tahta Amrillah, Xiaojie Qiao, Zaichun Sun

DOI: 10.1021/acs.cgd.6c00183

Cited by: 3

References: 95

Fields of Study & Subjects

Copper Interconnects and Reliability Semiconductor materials and devices Optical Coatings and Gratings

References 95