Scalable Fabrication of 4 nm Silicon Nanopores by Self-Limiting Metal-Assisted Chemical Etching Combined with Optical Process Control

Langmuir 2026 Open access

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Authors: Fabio De Ferrari, Alessandro Enrico, Chrysovalantou V. Leva, Shyamprasad N. Raja, Anna Herland, Frank Niklaus, Göran Stemme

DOI: 10.1021/acs.langmuir.6c00975

Cited by: 1

References: 40

Abstract

High Resolution Image Download MS PowerPoint Slide Solid-state nanopores in ultrathin (

Nanopore and Nanochannel Transport Studies Nanowire Synthesis and Applications Silicon Nanostructures and Photoluminescence

References 40