Templated Oxide Synthesis on Self-Assembled PS -b- PMMA via Atomic Layer Deposition

ACS Applied Materials & Interfaces 2026

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Authors: Wenda Bao, Yingdong Deng, Jiayi Chen, Weiyi Lin, Jin Xie, Xiaoyun Yu, Shisheng Xiong
DOI: 10.1021/acsami.6c01230
Cited by: 1
References: 29

Abstract

nanoline and pillar arrays are successfully fabricated using this method. The versatility of TOS demonstrates its broad applicability for precision nanofabrication across a range of material systems.

Fields of Study & Subjects

Anodic Oxide Films and Nanostructures Semiconductor materials and devices Mesoporous Materials and Catalysis

Publication details

Journal / source
ACS Applied Materials & Interfaces
Publisher
American Chemical Society (ACS)
Volume
18
Issue
18
Pages
26855–26861
Publication date
29 April 2026
Language
EN