Molybdenum Ion-Induced Adhesion of Colloidal Silica to Polyvinyl Acetal Brushes in Post-Chemical Mechanical Planarization Applications: Experiments and Multiscale Simulations

ACS Applied Materials & Interfaces 2026

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Authors: Sumit Kumar, Palwasha Jalalzai, Tae-Gon Kim, Jihoon Seo, Junsang Lee, Gayoung Kim, In-Soo Kim, Sangkyun Kim, Byung‐Hyun Kim, Jin-Goo Park
DOI: 10.1021/acsami.6c05073
Cited by: 1
References: 69

Abstract

content in the colloidal silica system, enhancing interactions with PVAc brushes. Density functional theory further confirmed strong interactions among silica particles, Mo oxides, and PVAc through quantum chemical parameters such as electrostatic potential, HOMO, and LUMO.

Fields of Study & Subjects

Advanced Surface Polishing Techniques Polymer Surface Interaction Studies Ion-surface interactions and analysis

Publication details

Journal / source
ACS Applied Materials & Interfaces
Publisher
American Chemical Society (ACS)
Volume
18
Issue
18
Pages
27086–27098
Publication date
30 April 2026
Language
EN