Electron-Induced Reactions in Solid Carbon Dioxide: Lithography and Methane Formation under High-Energy Irradiation

ACS Applied Materials & Interfaces 2026

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Authors: Rui Zheng, Kang Zhao, Limin Qi, Ding Zhao, Min Qiu

DOI: 10.1021/acsami.6c07591

Cited by: 1

References: 23

Abstract

as a promising resist material and provide mechanistic insight into electron-stimulated decomposition in iEBL.

Plasma Diagnostics and Applications Electron and X-Ray Spectroscopy Techniques Diamond and Carbon-based Materials Research

References 23