Plasma-Enhanced Atomic Layer Deposition Synthesis of Nanolayered Molybdenum Diselenide (MoSe 2 ) Thin Films for Nanoelectronics

ACS Omega 2026 Open access

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Authors: Fabian Sanchez, Ibraheem Giwa, Baraka Chimba, Edward Xiao, Kim Kisslinger, Dmytro Nykypanchuk, Tong Xiao, Fernando Camino, Rebhadevi Monikandan, Zhigang Xiao
DOI: 10.1021/acsomega.5c12568
Cited by: 1
References: 53

Abstract

by PE-ALD and its direct integration into transistor architectures.

Fields of Study & Subjects

2D Materials and Applications Chalcogenide Semiconductor Thin Films Semiconductor materials and devices

Publication details

Journal / source
ACS Omega
Publisher
American Chemical Society (ACS)
Volume
11
Issue
18
Pages
26523–26532
Publication date
1 May 2026
Language
EN