Visible Integrated Photonics with Tantalum Pentoxide

Abstract Developing chip-scale photonic platforms for the visible spectrum is essential for translating next-generation optical technologies. Here, we demonstrate that tantalum pentoxide Ta2O5 on insulator is a highly promising material framework for these applications, supporting high-Q resonator architectures across the visible spectral range. Utilizing routine and scalable thin-film deposition and fabrication methodologies, we realize Ta2O5 waveguide and resonator layouts compatible with photonic integrated circuit (PIC) architectures. Through a comparison with numerical simulations, we characterize compact racetrack resonators, evaluating their performance in both the green and blue spectral regions. In addition, we fabricate large-scale ring resonators exhibiting record-high quality factors for Ta2O5 in the visible spectrum, exceeding 7.0 × 104. These results highlight the immense potential of this platform for visible photonic systems and establish a robust, straightforward baseline for future visible integrated optics.