Multiphysics optomechanical sensing of a liquid on the micron scale

Microsystems & Nanoengineering 2026 Open access

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Authors: Hamidreza Neshasteh, Amideddin Mataji-Kojouri, Clément Le Fur, Ilan Shlesinger, Marco Ravaro, Marc Gély, Sébastien Hentz, Guillaume Jourdan, Ivan Favero
DOI: 10.1038/s41378-025-01095-y
Cited by: 1
References: 46

Abstract

We present an optomechanical device platform for characterization of rheological, optical and thermal properties of fluids on the micron scale. A suspended silicon microdisk resonator with a vibrating mass of 100 pg and an effective probing volume of less than a pL is used to monitor properties of different fluids at rest. By employing analytical models for fluid-structure interactions, thermo-optical effects and thermal diffusion, our platform determines the viscosity, density, compressibility, refractive index and thermal conductivity of the fluid, in a compact measurement setup. A single measurement takes as short as 70 μs, and the employed power can be less than 100 μW, guaranteeing measurement at rest and in thermal equilibrium.

Fields of Study & Subjects

Mechanical and Optical Resonators Force Microscopy Techniques and Applications Thermal properties of materials

Publication details

Journal / source
Microsystems & Nanoengineering
Publisher
Springer Science and Business Media LLC
Volume
12
Issue
1
Pages
10–10
Publication date
5 January 2026
Language
EN