High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect
Abstract
Wide-range and high-sensitivity hydrogen sensors are critically important for hydrogen safety in aerospace and advanced transportation sectors. This work demonstrates a thermal-conductivity surface acoustic wave (SAW) based sensor to achieve high sensitivity hydrogen sensing. By integrating thermal balance and acoustic wave equations, a precise mechanistic model elucidating the structure-activity relationships among gas flow rate, operating temperature, and MEMS architecture in determining sensing sensitivity is constructed. Guided by this model, the SAW hydrogen sensor with on-chip microheater integration was developed. Furthermore, a highly integrated SAW hydrogen sensing system with ultra-low baseline noise (
Fields of Study & Subjects
Gas Sensing Nanomaterials and Sensors
Mechanical and Optical Resonators
Acoustic Wave Resonator Technologies
Publication details
- Journal / source
- Microsystems & Nanoengineering
- Publisher
- Springer Science and Business Media LLC
- Volume
- 12
- Issue
- 1
- Publication date
- 27 February 2026
- Language
- EN