Wafer-scale monolayer dielectric integration on atomically thin semiconductors

Nature Materials 2026

View at publisher
Authors: Zhenzhen Shen, Haoqi Wu, Chunsen Liu, Z. M. Liu, Yongbo Jiang, Tanjun Wang, Peng Zhou
DOI: 10.1038/s41563-025-02445-x
Cited by: 5
References: 46

Fields of Study & Subjects

Ferroelectric and Negative Capacitance Devices 2D Materials and Applications Semiconductor materials and devices

Publication details

Journal / source
Nature Materials
Publisher
Springer Science and Business Media LLC
Volume
25
Issue
2
Pages
199–206
Publication date
12 January 2026
Language
EN