Two-dimensional crystalline hard masks for high-aspect-ratio nanofabrication

Nature Materials 2026

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Authors: Pranavram Venkatram, Ziheng Chen, Krishnendu Mukhopadhyay, Bob Hengstebeck, Lei Ding, Vlastimil Mazánek, Yang Yang, Zdenek Sofer, Saptarshi Das
DOI: 10.1038/s41563-026-02524-7
Cited by: 6
References: 50

Fields of Study & Subjects

2D Materials and Applications Nanowire Synthesis and Applications Ga2O3 and related materials

Publication details

Journal / source
Nature Materials
Publisher
Springer Science and Business Media LLC
Volume
25
Issue
5
Pages
737–746
Publication date
10 March 2026
Language
EN