Scalable transfer for industrial 2D-CMOS manufacturing

Nature Nanotechnology 2026

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Authors: Chandan Biswas, Souvik Ghosh, Steven Brems, Kenneth M. Liechti, Deji Akinwande
DOI: 10.1038/s41565-026-02217-x
Cited by: 1
References: 12

Fields of Study & Subjects

Advancements in Semiconductor Devices and Circuit Design 3D IC and TSV technologies Silicon and Solar Cell Technologies

Publication details

Journal / source
Nature Nanotechnology
Publisher
Springer Science and Business Media LLC
Volume
21
Issue
9
Pages
1217–1221
Publication date
22 July 2026
Language
EN