Monolithic three-dimensional integration of silicon transistors

Nature 2026

View at publisher
Authors: Bao Lam, Yung Man Yu, Hyunjun Nam, Hsu-Chih Ni, Shomik Chatterjee, Shaloo Rakheja, Jian‐Min Zuo, Qing Cao
DOI: 10.1038/s41586-026-10496-6
Cited by: 1
References: 57

Fields of Study & Subjects

Advancements in Semiconductor Devices and Circuit Design Semiconductor Quantum Structures and Devices Thin-Film Transistor Technologies

Publication details

Journal / source
Nature
Publisher
Springer Science and Business Media LLC
Volume
654
Issue
8119
Pages
652–659
Publication date
27 May 2026
Language
EN