Fabrication of focused electron beam induced deposition tips for high-speed atomic force microscopy using benchtop scanning electron microscopy

Nature Protocols 2026 Open access

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Authors: Motonori Imamura, Atsushi Miyagi, Alma P. Perrino, Simon Scheuring
DOI: 10.1038/s41596-026-01369-3
Cited by: 1
References: 27

Fields of Study & Subjects

Force Microscopy Techniques and Applications Advanced Electron Microscopy Techniques and Applications Electron and X-Ray Spectroscopy Techniques

Publication details

Journal / source
Nature Protocols
Publisher
Springer Science and Business Media LLC
Publication date
12 May 2026
Language
EN