Low-voltage U-shaped RF MEMS shunt switch integration for K-band phased array beam steering

This work presents the design and system-level integration of a low-voltage U-shaped meander RF MEMS shunt switch with a K-band phased array antenna for agile and efficient beam steering. The proposed switch achieves a pull-in voltage of 5.3 V, a return loss better than - 30 dB, and an insertion loss as 0.45 dB, ensuring minimal signal degradation across 18-27 GHz. By incorporating the switch into a distributed MEMS transmission line (DMTL) phase shifter network, discrete and reconfigurable phase states are realized, enabling dynamic control of the progressive phase shift between array elements. A four-element series-fed patch array integrated with the MEMS phase shifter demonstrates a steering range of ± 30 °C with low side-lobe levels and high radiation efficiency, confirming its suitability for high-frequency front-end modules. The results confirm that the proposed MEMS-integrated phased array achieves industry-leading low actuation voltage with minimal RF loss, positioning it as a strong candidate for 6G and satellite front-end modules.