A chip-scale image sensor integrated with a microelectromechanical system actuator

Nature Electronics 2026

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Authors: Rongbo Xie, Xiaoqin Liu, Haiyang Zhan, Guozhe Xuan, Fan Zhang, Bingbai Li, Ziqi Mei, Enze Zhou, Rui Ma, Zheng You, Fei Xing, Xiaoguang Zhao
DOI: 10.1038/s41928-026-01600-9
Cited by: 1
References: 43

Fields of Study & Subjects

CCD and CMOS Imaging Sensors Advanced MEMS and NEMS Technologies Piezoelectric Actuators and Control

Publication details

Journal / source
Nature Electronics
Publisher
Springer Science and Business Media LLC
Volume
9
Issue
5
Pages
544–554
Publication date
7 April 2026
Language
EN