Substrate-assisted cathodoluminescence

Abstract Electron-beam-induced luminescence typically relies on direct excitation by high-energy primary electrons. Here, we explore properties of an alternative excitation approach where cathodoluminescence (CL) is driven by substrate-generated electrons rather than by the primary electron beam. Using color centers in diamond as sensitive and durable local probes, we investigate the spatial profiles of such indirect CL in different geometries and substrates. Photon-correlation experiments demonstrate increased synchronization of emitters at reduced currents, which we propose as a method for extracting the effective indirect excitation currents experienced by the emitters. This approach enables the estimation of remarkably low currents, down to 0.1 pA, highlighting the potential of substrate-assisted excitation for minimally invasive probing of sensitive emitters in CL microscopy.