Piezoelectrically-enhanced 230 nm far-UV second harmonic generation in a polarity-inversion-free AlN/AlGaN strained-layer superlattice channel waveguide
Abstract
The primary purpose of growing AlN/AlGaN SLSs was to simplify the SHG device fabrication process. The wavelength spectra and power dependency confirms the first successful demonstration of far-UV emission from a polarity-inversion-free SLS structure.
Fields of Study & Subjects
GaN-based semiconductor devices and materials
Acoustic Wave Resonator Technologies
Plasmonic and Surface Plasmon Research
Publication details
- Journal / source
- Materials Advances
- Publisher
- Royal Society of Chemistry (RSC)
- Volume
- 7
- Issue
- 8
- Pages
- 4208–4216
- Publication date
- 1 January 2026
- Language
- EN