Local deformations quantified with the common sublattice method

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Authors: János L. Lábár, Ildikó Cora, Bela Pecz, Alexander Yu. Azarov, A. Kuznetsov
Cited by: 0
References: 19

Abstract

Due to epitaxial relationship, there exists a common sublattice, which is close (< δ ) to any measured spot of either the substrate or the layer. Lattice-fitting procedure adjusts it to the measured spots without the need to know their origin.

Fields of Study & Subjects

Optical Coatings and Gratings Optical measurement and interference techniques Electron and X-Ray Spectroscopy Techniques

Publication details

Journal / source
Nanoscale
Volume
18
Issue
4
Pages
2264–2276
Publication date
1 January 2026
Language
EN