Laser interference lithography-defined electrochemical etching of ordered InP nanopore arrays

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Authors: Xiangyu Chai, Zhankun Weng, Huazhen Zhong, Mengqi Sun, Jingwei Yang, Jian Qiao, Xinming Zhang
Cited by: 5
References: 50

Abstract

To address the challenge of disordered crysto-oriented pore (COP) formation during organized porous InP growth, we demonstrate a strategy based on laser interference lithography-defined electrochemical etching to achieve intact porous InP structures.

Fields of Study & Subjects

Silicon Nanostructures and Photoluminescence Nanowire Synthesis and Applications Nanopore and Nanochannel Transport Studies

Publication details

Journal / source
Nanoscale
Publisher
Royal Society of Chemistry (RSC)
Volume
18
Issue
9
Pages
4821–4831
Publication date
1 January 2026
Language
EN