Micro-branched crosslinked photosensitive polyimides (PSPIs): optimizing dielectric, thermal, and lithographic performance

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Authors: Xinhao Nie, Daliao Tao, Zhuo Wang, Sanchuan Qiao, Lijun Xiao, 陈宇宏, Haoyuan Li, Xiaojun Peng, Jianhua Zhang
Cited by: 1
References: 32

Abstract

Photosensitive polyimides (PSPIs) are critical for advanced packaging but face limitations due to their dielectric performance and lithographic resolution.

Fields of Study & Subjects

Synthesis and properties of polymers Dielectric materials and actuators 3D IC and TSV technologies

Publication details

Journal / source
Polymer Chemistry
Publisher
Royal Society of Chemistry (RSC)
Volume
17
Issue
12
Pages
1210–1221
Publication date
1 January 2026
Language
EN