Author response for "Extreme Ultraviolet induced reactions of tin-oxo cage photoresists"

2026

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Authors: Najmeh Sadegh, Jarich Haitjema, Yu Zhang, Lianjia Wu, Ivan Bespalov, Olivier C. M. Lugier, Dimitrios Kazazis, Michaela Vockenhuber, Yasin Ekinci, Katharina Witte, Benjamin Watts, Ivan K. Pollentier
+2 more Danilo D. Simone, Albert Manfred Brouwer
DOI: 10.1039/d5tc04167h/v2/response1
Cited by: 0

Fields of Study & Subjects

Advancements in Photolithography Techniques Photopolymerization techniques and applications Photochromic and Fluorescence Chemistry

Publication details

Publication date
25 January 2026