6-Bit multilevel and highly linear synaptic plasticity in sputtered AlScN ferroelectric capacitors on (100) Si
Abstract
Fully CMOS-compatible sputtered AlScN ferroelectric capacitors deliver 64 conductance states with near-linear weight updates, achieving 94.72% MNIST accuracy and validating their potential for large-scale neuromorphic computing.
Fields of Study & Subjects
Ferroelectric and Negative Capacitance Devices
Advanced Memory and Neural Computing
Ferroelectric and Piezoelectric Materials
Publication details
- Journal / source
- Journal of Materials Chemistry C
- Volume
- 14
- Issue
- 18
- Pages
- 7829–7835
- Publication date
- 1 January 2026
- Language
- EN