Front cover
Abstract
Ruthenium( II ) carbonyl amidates -a new class of precursors for atomic layer deposition
Fields of Study & Subjects
Semiconductor materials and devices
Advanced Materials and Semiconductor Technologies
Synthesis and characterization of novel inorganic/organometallic compounds
Publication details
- Journal / source
- Dalton Transactions
- Volume
- 55
- Issue
- 10
- Pages
- 4003–4004
- Publication date
- 1 January 2026
- Language
- EN