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Abstract

Ruthenium( II ) carbonyl amidates -a new class of precursors for atomic layer deposition

Fields of Study & Subjects

Semiconductor materials and devices Advanced Materials and Semiconductor Technologies Synthesis and characterization of novel inorganic/organometallic compounds

Publication details

Journal / source
Dalton Transactions
Volume
55
Issue
10
Pages
4003–4004
Publication date
1 January 2026
Language
EN