Nano flexible scanning platform and its control algorithm

As advanced nanoactuators, nano flexible scanning platforms can quickly and stably achieve multi-axis scanning positioning at the nanoscale, and they are widely used in advanced fields such as chemical detection, micro–nano measurement, microelectromechanical control, and optical positioning. Such platforms usually include horizontal and vertical scanners, whose mechanical structure and combined multi-axis scanning will directly affect the response speed and displacement performance. The circuit and measurement system and nonlinear control algorithm are also crucial, since small changes to these can affect platform resolution and stability. Therefore, in this paper, a nano scanning platform with flexible hinge structure and a dedicated circuit and measurement system is designed. The platform has a three-axis structure combining series and parallel connections. An improved sliding mode closed-loop controller is proposed for nonlinear errors, which further improves the scanning accuracy of the platform through subdivision calculation and segmented calibration methods. Experiments prove the effectiveness of the nano flexible scanning platform and its control algorithm.