Two-dimensional PIC/MCC modeling of inductively coupled plasma: A benchmark study in the GEC configuration

For inductively coupled plasma (ICP), accurately modeling power deposition and electron heating remains a fundamental challenge. This study presents a two-dimensional axisymmetric implicit particle-in-cell/Monte Carlo collision simulation of ICP in a Gaseous Electronics Conference reference cell, with a focus on the influence of high-order harmonic currents. By resolving harmonic-resolved electromagnetic fields, the simulation captures key nonlinear and nonlocal plasma behaviors under low-pressure conditions. Results reveal spatially nonuniform power deposition, electron energy probability function, and ion energy distribution function, emphasizing the importance of kinetic effects and higher harmonics in accurately modeling ICP discharges. The simulated electron density, temperature, and potential profiles align well with experimental data, validating the model. This work enhances the understanding of power coupling dynamics in ICP and provides insights for the design and optimization of plasma-based technologies such as semiconductor processing.