Demonstration of KV-class β-Ga2O3 trench junction barrier Schottky diodes with space-modulated junction termination extension
Abstract
In this work, we report on the design and fabrication of p-NiO/Ga2O3 trench junction barrier schottky diodes (JBSDs) integrated with space-modulated junction termination extension (SM-JTE) and compare the performance with planar Ni/Ga2O3 schottky barrier diodes (SBDs) and p-NiO/Ga2O3 heterojunction diodes (HJDs). The JBSDs achieved breakdown voltages exceeding 1.8 kV along with low leakage currents (
Fields of Study & Subjects
Ga2O3 and related materials
GaN-based semiconductor devices and materials
Photocathodes and Microchannel Plates
Publication details
- Journal / source
- APL Electronic Devices
- Publisher
- AIP Publishing
- Volume
- 2
- Issue
- 1
- Publication date
- 28 January 2026
- Language
- EN