Ion–ion oscillation and periodic emission pattern in electronegative capacitively coupled radio frequency plasmas

Physics of Plasmas 2026 Open access

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Authors: Tianhong Wang, Shahid Rauf, Niklas Friedrichs, Ihor Korolov, Jason Kenney, Julian Schulze
DOI: 10.1063/5.0300388
Cited by: 2
References: 57

Abstract

Experimental observation and numerical analysis of low-frequency (LF) waveform-induced ion–plasma oscillations in low-pressure capacitively coupled plasmas operated in argon/oxygen mixtures are reported. We investigate the spatiotemporal excitation dynamics of dual-frequency (high-frequency, HF = 13.56 MHz and low-frequency, LF = 135–400 kHz) voltage-driven discharges using phase-resolved optical emission spectroscopy. Under oxygen-rich and low-pressure conditions (

Fields of Study & Subjects

Plasma Diagnostics and Applications Dust and Plasma Wave Phenomena Plasma Applications and Diagnostics

Publication details

Journal / source
Physics of Plasmas
Publisher
AIP Publishing
Volume
33
Issue
2
Publication date
1 February 2026
Language
EN