Calculation of sputtering yield using the TRIM program for the effect of noble gas ions on human skin
Abstract
Experimental calculations were made for the Sputtering yield after bombarding the target (human skin) with one layer, 8 atoms, 30 Angstroms of noble gas ions (He) and (Ar) with different energies up to (10Kev). The numbers of incidence ions for Helium and Argon between (1000-2000) ions are using the experimental simulation program TRIM. The connection between the Sputtering and the energies was drawn graphically with fixing the angle of the incidence ion (θ=0) for the Helium ion and the Argon. And the connection between the Sputtering and the angle incidence of the ions is made by fixing the ion energy (1Kev). It was found that the Sputtering yield directly be governed by on the energy of the incidence of ions on the target and the angle of incidence. As a result, the Sputtering according to increasing of the angles of incidence is close to (60°) and more, as the increase becomes clear at (80°) and at greater angles than them, the values of the Sputtering yield decrease. We can note through our work that the sputtering yield of (He) ion is less than (Ar) ion. As a result, a comparison of (He) ion with (Ar) ion, we can find out that the latter is the greatest sputtering. Because the atomic number of Argon ion is larger than the atomic number of (He) ion where directly comparative to the sputtering yield.
Fields of Study & Subjects
Ion-surface interactions and analysis
Radiation Therapy and Dosimetry
Fusion materials and technologies
Publication details
- Journal / source
- AIP conference proceedings
- Volume
- 3415
- Pages
- 030007–030007
- Publication date
- 1 January 2026
- Language
- EN