Characterization of current-flux and current-force relationships in reluctance actuators for high-precision applications
Abstract
Due to their high output power density compared to Lorentz actuators, reluctance actuators have been increasingly employed in high-precision applications, such as lithography machines. However, the strong nonlinearity between the input current and the output magnetic force remains a challenging modeling task, which can significantly reduce control accuracy. This work presents an experimental characterization of the current-force relationship of a custom-made reluctance actuator. The current-to-flux and the current-to-force hysteresis nonlinearities are investigated in this study under various air gaps.
Fields of Study & Subjects
Electric Motor Design and Analysis
Piezoelectric Actuators and Control
Magnetic Properties and Applications
Publication details
- Journal / source
- AIP Advances
- Volume
- 16
- Issue
- 2
- Publication date
- 1 February 2026
- Language
- EN