Nested 4-/8- spokes architecture for mode matching in (100) silicon disk resonator

Abstract In this paper, we present a novel disk resonator gyroscope (DRG) structure specifically designed to address the anisoelasticity challenges posed by (100) single crystal silicon (SCS), enabling effective mode-matching. The DRG comprises two 4-spokes substructures (4-spokes DRG) and an inner nested 8-spokes substructure (8-spokes DRG), this unique arrangement not only compensates for stiffness mismatches but also strategically utilizes the 4-spokes substructures to limit spoke deformation, thereby minimizing thermoelastic damping. After parameter optimization, finite element analysis demonstrates a frequency split as small as 18 ppm. Both numerical simulations and experimental evaluations were conducted to verify the device’s performance. Compared with previous experimental results from other group’s work, the fabricated DRG using (100) silicon demonstrated a reduced frequency mismatch from 4.73% to 0.39%. These results suggest that the proposed DRG is promising in high-performance applications, particularly in FM and rate-integrating gyroscopes.