A miniaturized magnetoresistive chip for full-angle detection based on magnetic films and multilayers

To develop high-precision and wide-range angular displacement sensing technology suitable for diverse environments, anisotropic magnetoresistance (AMR) chips need to be improved for realizing full-angle detection. In this work, the AMR and anomalous Hall effect (AHE) magnetic films were investigated in detail. It was found that a device combining AMR and AHE enables high-precision full-angle detection. The AMR films with appropriate layout designs enable high-precision angular displacement detection from 0° to 180°, while the AHE films with perpendicular magnetic anisotropy facilitate full-angle detection through magnetic field polarity identification. This research helps to design and optimize the high-precision and wide-range angular displacement sensing technology based on the AMR and AHE films, particularly applicable to fields such as industrial systems, consumer electronics, automation, and medical devices.