Dynamics, stability, and sensitivity analysis of a mode-localization MEMS gyroscope subjected to single and dual parametric excitation

Abstract This study investigates a mode-localization micro-electro-mechanical system gyroscope subjected to single parametric excitation (SPE) and dual parametric excitation (DPE). We employ multi-scale method to solve the amplitude-frequency response and obtain the amplitude ratio (AR) sensitivity, while studying the effects of the SPE and DPE on AR sensitivity. Finally, we conducted parameter stability analysis using Floquet theory. The results show that smaller coupling stiffness yields a larger AR. Increasing the parametric excitation voltage simultaneously enhances both AR sensitivity and amplitude, though it narrows the angular velocity measurement range. Building upon this, the initial phase can further enhance AR sensitivity and amplitude, with this improvement becoming more pronounced as the parametric excitation voltage increases. Moreover, the initial phase enables a more compact unstable region. Compared to no parametric excitation and the SPE, the DPE enhances AR sensitivity by 40.5% and 9.5% respectively through adjustment of parametric excitation voltage and initial phase.