Method for measuring elastic parameters of high-stiffness doubly clamped beams in micro-nano devices

Abstract Micron-scale high-stiffness doubly clamped beams are core structures in micro- and nanodevices such as accelerometers and gyroscopes. Owing to their small size and high natural frequency, they play an important role in the development of microelectromechanical systems. However, the relatively high uncertainty of existing measurement methods presents significant challenges for elastic-parameter measurement. This study proposes a method for measuring the elastic parameters of micron-scale high-stiffness doubly clamped beams. A parallelogram flexure hinge combined with a precision balance is introduced to measure the equivalent stiffness, while piezoelectric ceramic excitation is used to induce microbeam vibration and determine the equivalent mass and damping coefficient. The proposed method enables the equivalent stiffness, equivalent mass, and damping coefficient to be obtained within a unified measurement framework, while providing SI traceability and good measurement repeatability. Based on the simulation and experimental results, the measured equivalent stiffness, equivalent mass, and damping coefficient of the micron-scale high-stiffness doubly clamped beam were 21 309 N m −1 , 0.023 mg, and 0.002 kg s −1 , respectively, with corresponding relative standard uncertainties of 2.1%, 8.6%, and 4.1%.