Enhancement of plasma density in radio-frequency capacitively coupled discharge by synergy of plasma series resonance and electron cyclotron resonance
Abstract
Abstract A novel technique for enhancement of plasma density in low-pressure magnetized radio-frequency capacitively coupled plasmas is proposed and experimentally verified. When plasma series resonance (PSR) was excited in the electron cyclotron resonance (ECR) regime, a significant increase of plasma density, together with an unusual change in its axial distribution, was observed. The effect is attributed to synergy of PSR and ECR, with the former enhancing the electric field in the bulk plasma and the latter providing highly efficient electron heating.
Fields of Study & Subjects
Low-Pressure Plasma Processing and Diagnostics
Vacuum and Plasma Arcs
Atmospheric-Pressure Plasma Applications
Publication details
- Journal / source
- Plasma Sources Science and Technology
- Volume
- 35
- Issue
- 3
- Pages
- 035012–035012
- Publication date
- 1 March 2026
- Language
- EN