Study on silicon dioxide chemical mechanical planarization using iron-cobalt double-doped cerium dioxide abrasives
Abstract
Abstract In this paper, iron-cobalt double-doped CeO 2 (CeO 2 -FeCo) abrasives was synthesized by hydrothermal method with a particle size of about 50 nm. It was found that iron-cobalt double-doping could effectively regulate the lattice structure and Ce 3+ /Ce 4+ of CeO 2 ratio by Raman, UV–vis, XPS experiments. CMP experiments show that CeO 2 -FeCo has the optimal polishing effect, with a removal rate of 365.1 nm min −1 and a low surface roughness as low as 0.148 nm, which is mainly attributed to the improvement of the Ce 3+ content (25.7% to 32.65%) on the surface roughness improvement.
Fields of Study & Subjects
Advanced Surface Polishing Techniques
Diamond and Carbon-based Materials Research
Minerals Flotation and Separation Techniques
Publication details
- Journal / source
- Physica Scripta
- Publisher
- IOP Publishing
- Volume
- 101
- Issue
- 19
- Pages
- 195911–195911
- Publication date
- 24 April 2026