Design of magnetic MEMS micro-speakers

Journal of Physics Conference Series 2026 Open access

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Authors: Perla Malagò, Florian Slanovc, Michael Ortner, Luiz Guilherme Enger, Matteo Montagnese, Povilas Smaliukas, Jochen Bardong, Ivan I. Shishkin, Christian Novotny, Samu Horvath, Andrea Rusconi, Stefano Lumetti
DOI: 10.1088/1742-6596/3161/1/012039
Cited by: 0
References: 12

Abstract

Abstract In this paper, a new method for the design of planar magnetic MEMS micro-speakers is reported. The proposed methodology is based on semi-analytical calculations, and it allows for fast MEMS prototyping and system optimization. This method is applied to design a planar magnetic MEMS micro-speaker under specific constraints. Finally, a systematic investigation of the dependence of the electromagnetic force on the system parameters is performed.

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Dielectric materials and actuators Mechanical and Optical Resonators

Publication details

Journal / source
Journal of Physics Conference Series
Volume
3161
Issue
1
Pages
012039–012039
Publication date
1 January 2026