Dynamic growth control of complex oxide heterostructures

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Authors: Fryderyk Lyzwa, Leonard Schüler, V. Moshnyaga
Cited by: 0
References: 16

Abstract

Abstract We report on a dynamic metalorganic aerosol deposition (dyna-MAD) technique, that allows dynamic growth control of thin film heterostructures with complex oxide constituents. This method enables the deposition of gradient (or ‘graded’) heterostructures of (LaMnO 3 ) x /(SrMnO 3 ) y . In situ optical ellipsometry reveals a modified electronic and optical material’s response with changing amount of gradient. Structure and microstructure are characterized by means of x-ray diffraction and atomic force microscopy measurements, which confirm epitaxial thin film growth.

Fields of Study & Subjects

Electronic and Structural Properties of Oxides Advanced Materials and Semiconductor Technologies ZnO doping and properties

Publication details

Journal / source
Journal of Physics Conference Series
Volume
3161
Issue
1
Pages
012041–012041
Publication date
1 January 2026