Up-to-date test beam results of ATLAS ITk pixel sensors and modules

Abstract The ATLAS Inner Detector will be replaced by a new all-silicon Inner Tracker (ITk) in 2029 to meet the challenges of the High Luminosity LHC (HL-LHC). The ITk pixel system combines 3D sensors at the innermost layer, operating after exposure to fluences of up to 2 × 10 16 n eq /cm 2 , with thin n-in-p planar modules in the outer layers. Beam tests are essential for qualifying these sensors and modules before and after irradiation. Recent test beam campaigns in 2024 evaluated new fabrication techniques, thick planar sensors, and modules with the latest ITkPixV2 readout chip, while the 2025 program introduces novel 3D triplet and planar quad configurations. Recent test beam results will be presented here, highlighting sensor performance and readiness of the ITk pixel detectors for HL-LHC operation.