Design and experimental study of piezoelectric-driven fluid pumps

Abstract To address the limitations of one-way valve piezoelectric pumps in terms of flow control precision and output efficiency, this paper proposes a valveless piezoelectric pump with flow resistance. Leveraging its unique structure, which exhibits different flow resistance ratios in forward and reverse directions, it achieves unidirectional fluid delivery. This paper provides a detailed exposition of the structure and working principle of the piezoelectric pump. It conducts theoretical and simulation analyses of its internal flow field. Utilizing COMSOL simulation software, the study simulates and analyzes the impact of various structural optimization parameters on the pump’s output performance, thereby determining the optimal design parameters. A prototype of the piezoelectric pump is fabricated using 3D printing technology. An experimental platform is established to test and validate the influence of flow resistance body structural parameters on the pump’s output performance under effective drive voltage and drive frequency conditions. Under driving conditions of 150 V/18 Hz, the maximum output flow rate reached 18.94 ml min −1 when the flow resistance element configuration comprised 3 elements, each 7 mm in length, arranged at a 35° angle.