CMOS-compatible metasurface piezoelectric micromachined ultrasonic transducers for enhanced ultrasonic transmission

Physical Review Applied 2026

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Authors: Zepeng Wu, Shicheng Zhao, Qiaozhen Zhang, Yicheng Wang, Feifei Wang, Dongdong Gong, Feihong Bao, Ying Cheng, Xi Liu

DOI: 10.1103/3fll-bmnz

Cited by: 1

References: 30

Fields of Study & Subjects

Ultrasound Imaging and Elastography Radio Frequency Integrated Circuit Design 3D IC and TSV technologies

References 30