Quantum magnetometer chip based on industrially scalable 4H-SiC technology

This work presents an industrially scalable, power-efficient quantum magnetometer chip based on 4H-silicon carbide (SiC) technology, leveraging wafer-scale fabrication techniques to optimize V2 silicon-vacancy color centers for reproducible fabrication. The integration of these color center ensembles into a planar silicon carbide waveguide enables efficient excitation of a large ensemble and simplifies fluorescence extraction compared with standard confocal methods. We report continuous wave (cw) optically detected magnetic resonance measurements, complemented by Rabi, Ramsey, and Hahn-echo sequences, which demonstrate the coherent capabilities of the large embedded ensemble of V2 centers. Based on the data, our device exhibits sensor shot-noise-limited sensitivities of around 30 nT / Hz , 2–3 orders of magnitude lower compared with more complex confocal techniques. This concept simplifies the quantum sensor architecture, enhances sensitivity, and streamlines optical excitation and collection, thereby paving the way for the development of next-generation SiC-quantum sensing technologies.