Synergistically promoted direct bonding of nanotwinned copper at 200 °C viareductive solvents
Abstract
Purpose This study aims to address the high-temperature bottleneck of Cu-Cu direct bonding in three dimensional (3D) heterogeneous integration (3D HI) by proposing a synergistic regulation strategy involving (111) preferred orientation nanotwinned copper [(111) nt-Cu] and 5% ascorbic acid aqueous solution. Design/methodology/approach Bonding experiments were conducted under 200 °C, 30 MPa and a vacuum of
Fields of Study & Subjects
3D IC and TSV technologies
Electronic Packaging and Soldering Technologies
Aluminum Alloys Composites Properties
Publication details
- Journal / source
- Soldering and Surface Mount Technology
- Publisher
- Emerald
- Pages
- 1–7
- Publication date
- 19 January 2026
- Language
- EN