Design and Simulation of a Compact Three-Axis Capacitive Accelerometer With Multiple Differential Proof Masses

IEEE Access 2026 Open access

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Authors: Mahdi Fazli, Davoud Razaghpour, Ali Asghar Naderi
DOI: 10.1109/access.2026.3661901
Cited by: 2
References: 33

Fields of Study & Subjects

Inertial Sensor and Navigation Geophysics and Sensor Technology Magnetic Field Sensors Techniques

Publication details

Journal / source
IEEE Access
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
14
Pages
20628–20638
Publication date
1 January 2026