Understand and Detect: Lithographic Hotspot Detection by the Interpretable Graph Attention Network

Asia and South Pacific Design Automation Conference (ASP-DAC) 2026

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Authors: Andy T. Liu, Silin Chen, Guohao Wang, W. Z. Zhao, Yuxiang Fu, Ningmu Zou
DOI: 10.1109/asp-dac66049.2026.11420514
Cited by: 0
References: 27

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Advancements in Photolithography Techniques VLSI and FPGA Design Techniques

Publication details

Journal / source
Asia and South Pacific Design Automation Conference (ASP-DAC)
Pages
618–624
Publication date
19 January 2026
Language
EN