Self-Test and Calibration Techniques for MEMS Gyroscope: A Review

The gyroscopes have gained significant attention in many applications such as navigation system, medical sensors due to their small size, low power consumption and capability of integration with CMOS circuits. However, it is affected by temperature, bias, vibration, noise. The review begins with a study different types of MEMS gyroscopes. Then study different self-test methods which use either electrostatic excitation or built-in self-test (BIST) systems to validate their fundamental, and also ways calibration methods for MEMS gyroscopes that include both offline and online calibration techniques and explain the latest data-driven and adaptive calibration methods. The research establishes a systematic review process which enables researchers to compare current MEMS gyroscope systems while developing methods that achieve dependable and precise measurement results.