Research on Numerical Modeling and Performance Optimization of Multi-comb MEMS Electrostatic Sensor Chip

2026 5th International Conference on Electronics, Integrated Circuits and Communication Technology (EICCT) 2026

View at publisher
Authors: Xingmou Liu, Ying Cui, Xun Sun, Ning Yang, Yao Xiao, Ammad Jadoon
DOI: 10.1109/eicct69950.2026.11564168
Cited by: 1

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Advanced Sensor and Energy Harvesting Materials Electrical and Bioimpedance Tomography

Publication details

Journal / source
2026 5th International Conference on Electronics, Integrated Circuits and Communication Technology (EICCT)
Publisher
IEEE
Pages
327–330
Publication date
24 April 2026