Fabrication of Non-Lithographic Metal Masks for Metal-Assisted Chemical Etching of Silicon

2026

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Authors: Ekaterina Glushets
DOI: 10.1109/elcon-mn69838.2026.11417114
Cited by: 0
References: 10

Fields of Study & Subjects

Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques Laser Material Processing Techniques

Publication details

Pages
13–16
Publication date
3 February 2026
Language
EN