Modeling and Analysis of the Design of Sensitive Element of a Capacitive Type Micromechanical Accelerometer

2026

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Authors: Paing Soe Thu, Калугин Виктор Владимирович, Кочурина Елена Сергеевна, Ye Min Hlaing, Satt Naing Moe
DOI: 10.1109/elcon-mn69838.2026.11417117
Cited by: 0
References: 7

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Inertial Sensor and Navigation Sensor Technology and Measurement Systems

Publication details

Pages
30–35
Publication date
3 February 2026
Language
EN