Research Progress on Temperature and Humidity Composite Sensor Technology

Temperature and humidity composite sensor is a core sensing device in environmental monitoring, Internet of Things, smart wearable, biomedicine, industrial control and other fields, which can realize accurate and rapid measurement of temperature and humidity simultaneously. This paper systematically sorts out the technical characteristics and limitations of traditional temperature and humidity sensors, focuses on reviewing the research progress of advanced temperature and humidity composite sensors such as MEMS, CMOS integration, surface acoustic wave, optical fiber, and chipless RFID around four dimensions: design architecture, preparation process, performance test and typical application, combined with the existing research results related to design, process and test. It compares the sensitivity, accuracy, response speed, integration degree and process compatibility of different technical routes, summarizes the current technical bottlenecks and development trends, so as to provide a reference for the research and development and engineering of a new generation of highly integrated, high-precision and low-power temperature and humidity composite sensing systems.